Silicon Carbide Microelectromechanical Systems For Harsh EnvironmentsThis unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high quality up to date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the